Distinguished by its wide temperature sensing range, the five-channel Luxtron FluorOptic thermometry (FOT) converter is suitable for plasma-enhanced semiconductor deposition and etch fabrication processes, said Advanced Energy Industries. The multi-channel Luxtron M-1100 operates from -200 degrees C, the start of the cryogenic range, to ‘hot chuck’ temperatures of +450 degrees C. According to Advanced Energy, […]
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